PDF Ebook Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press

PDF Ebook Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press

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Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press

Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press


Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press


PDF Ebook Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press

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Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

  • Amazon Sales Rank: #1734518 in Books
  • Brand: Brand: CRC Press
  • Published on: 2001-06-29
  • Original language: English
  • Number of items: 1
  • Dimensions: 10.00" h x 7.25" w x 1.50" l, 3.73 pounds
  • Binding: Hardcover
  • 896 pages
Features
  • Used Book in Good Condition

Review …recommended for special libraries and academic libraries serving graduate level programs in these areas.- E-Streams…a cornerstone reference source….uniquely ample and thorough. -Semiconductor International…a formative instrument. …contains valuable and very new information … an instructive and valuable book. -IASI Polytechnic Magazine

Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press PDF
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Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press PDF

Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press PDF

Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press PDF
Handbook of Silicon Semiconductor MetrologyFrom Brand: CRC Press PDF

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